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ecolite Ecolite3000, successor of the Tera Series, is a simple and economic Low Temperature Ashing System designed with a Low Damage Remote Microwave Plasma Source & Bias Power.

The system achieves high ashing rates(2micro m/min) under low temperature conditions and high performance Descum processes for flip-chip bumping applications. High productivity, process recipe flexibility and small design footprints lead to Low Cost Ownership for customers.

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